SEMICONDUCTOR DEVICE

A semiconductor device according to an embodiment, includes a gate electrode, a first dielectric film, a first oxide semiconductor film, a second dielectric film, a source electrode, a source wire, a drain electrode, and a drain wire. The source wire is arranged on the second dielectric film, and co...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OHGURO TATSUYA, KANREI NOBUKI, FUKASE KAZUYA, NAKANO SHINTARO, MOMOSE HISAYO, MOROOKA TETSU, MAEDA YUYA, TORIYAMA SHUICHI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device according to an embodiment, includes a gate electrode, a first dielectric film, a first oxide semiconductor film, a second dielectric film, a source electrode, a source wire, a drain electrode, and a drain wire. The source wire is arranged on the second dielectric film, and connected to the source electrode. The drain wire is arranged on the second dielectric film, and connected to the drain electrode. At least one of the source wire and the drain wire includes a fringe portion sticking out above a channel region. A barrier film that suppresses intrusion of hydrogen is arranged being in contact with at least one of an upper surface and a lower surface of the fringe portion. A region where the barrier film is not formed is included above the channel region.