PRESSURE SENSOR DEVICE AND PRESSURE SENSOR DEVICE MANUFACTURING METHOD

Provided are a pressure sensor device and method for making the same. A base member and a pressure sensor chip are joined so that a pressure receiving portion is aligned with a through hole. A pressure introduction unit and the base member are positioned and joined so that through holes thereof are...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SATO EISUKE, ASHINO KIMIHIRO, SHINODA SHIGERU
Format: Patent
Sprache:eng
Schlagworte:
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