PRESSURE SENSOR DEVICE AND PRESSURE SENSOR DEVICE MANUFACTURING METHOD

Provided are a pressure sensor device and method for making the same. A base member and a pressure sensor chip are joined so that a pressure receiving portion is aligned with a through hole. A pressure introduction unit and the base member are positioned and joined so that through holes thereof are...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SATO EISUKE, ASHINO KIMIHIRO, SHINODA SHIGERU
Format:	Patent
Sprache:	eng
Schlagworte:	FORGE FURNACES FORGING HAMMERING MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVINGMATERIAL PERFORMING OPERATIONS PHYSICS PRESSING METAL PUNCHING METAL RIVETING TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	Provided are a pressure sensor device and method for making the same. A base member and a pressure sensor chip are joined so that a pressure receiving portion is aligned with a through hole. A pressure introduction unit and the base member are positioned and joined so that through holes thereof are continuous. The pressure introduction unit has a stepped portion in an end portion on an opened end side, and has a protruding portion protruding from the stepped portion to the base member side in an end portion.