THREE-PORT MICROVALVE WITH IMPROVED SEALING MECHANISM

A microvalve includes a first plate having an inner surface, a recessed region provided within the inner surface, a normally open fluid port and a normally closed fluid port provided within the recessed region. A first sealing structure extends about the normally open fluid port, and a second sealin...

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Bibliographische Detailangaben
Hauptverfasser: YANG CHEN, OJEDA, SR. JOE A, FULLER EDWARD NELSON, ARUNASALAM PARTHIBAN, GURLEY GENGXUN K
Format: Patent
Sprache:eng
Schlagworte:
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