THREE-PORT MICROVALVE WITH IMPROVED SEALING MECHANISM

A microvalve includes a first plate having an inner surface, a recessed region provided within the inner surface, a normally open fluid port and a normally closed fluid port provided within the recessed region. A first sealing structure extends about the normally open fluid port, and a second sealin...

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Bibliographische Detailangaben
Hauptverfasser: YANG CHEN, OJEDA, SR. JOE A, FULLER EDWARD NELSON, ARUNASALAM PARTHIBAN, GURLEY GENGXUN K
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A microvalve includes a first plate having an inner surface, a recessed region provided within the inner surface, a normally open fluid port and a normally closed fluid port provided within the recessed region. A first sealing structure extends about the normally open fluid port, and a second sealing structure extends about the normally closed fluid port. A second plate defines a non-movable portion and a movable portion. A surface of the non-movable portion abuts the inner surface of the first plate, the non-movable portion having an opening formed therethrough. The movable portion is formed within the opening, has an axis, and defines a displaceable member connected to the non-movable portion by a convoluted spring formed in the opening. The displaceable member is slidingly and axially movable within the opening between a first position, wherein the displaceable member cooperates with the second sealing structure to prevent fluid communication through the normally closed fluid port, and a second position, wherein the displaceable member does not cooperate with at least a portion of the second sealing structure to prevent fluid communication through the normally closed fluid port.