IONIZATION VACUUM MEASURING CELL

An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber...

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Bibliographische Detailangaben
Hauptverfasser: ENDERES ROLF, STOCKER RUDOLF, ANDREAUS BERNHARD, WUEST MARTIN, UNTERMARZONER OSKAR
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).