APPARATUS AND METHOD FOR TUNING A PLASMA PROFILE USING A TUNING RING IN A PROCESSING CHAMBER

Embodiments of the present invention relate to apparatus for improving a plasma profile during plasma processing of a substrate. According to embodiments, the apparatus includes a tuning ring electrically coupled to a variable capacitor. The capacitance is controlled to control the RF and resulting...

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Bibliographische Detailangaben
Hauptverfasser:	CHEN JIAN J, AYOUB MOHAMAD A
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Embodiments of the present invention relate to apparatus for improving a plasma profile during plasma processing of a substrate. According to embodiments, the apparatus includes a tuning ring electrically coupled to a variable capacitor. The capacitance is controlled to control the RF and resulting plasma coupling to the tuning ring. The plasma profile and the resulting deposition film thickness across the substrate are correspondingly controlled by adjusting the capacitance and impedance at the tuning ring.