INTEGRATED CIRCUITS WITH AN INSULTATING LAYER AND METHODS FOR PRODUCING SUCH INTEGRATED CIRCUITS

Integrated circuits and methods for producing the same are provided. A method of producing the integrated circuits includes forming an insulating layer overlying a substrate. The insulating layer includes a first composition that includes silicon oxide and a porogen. The porogen is removed from the...

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Bibliographische Detailangaben
Hauptverfasser: STRECK CHRISTOF, PFUTZNER RONNY, POPA ANDREIA IOANA
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Integrated circuits and methods for producing the same are provided. A method of producing the integrated circuits includes forming an insulating layer overlying a substrate. The insulating layer includes a first composition that includes silicon oxide and a porogen. The porogen is removed from the first composition to form a second composition that includes a pore, where the second composition has a dielectric constant lower than that of the first composition. An insulating layer mechanical property desired range is determined, where the second composition has an insulating material mechanical property outside of the insulating layer mechanical property desired range. The second composition is altered to form a third composition, where the third composition has the insulating layer mechanical property within the insulating layer mechanical property desired range.