TEMPLATE ASSEMBLY AND METHOD OF PRODUCING TEMPLATE ASSEMBLY

The invention is directed to a template assembly configured to hold a workpiece in polishing of the workpiece, including: a PET base; an annular template adhering to an outer circumferential portion of a lower surface of the PET base, the template having an annular notch formed at an upper portion of an inner surface of the template; and a discoid backing pad whose peripheral portion is fitted into the notch, the backing pad adhering to a central portion of the lower surface of the PET base, wherein a recess configured to receive and hold the workpiece during polishing is defined by the inner surface of the template and a lower surface of the backing pad. This template assembly can reduce in-plane variation in depth of the recess and thereby improve flatness of a polished workpiece while inhibiting the occurrence of a scratch and a defect of the workpiece.