SUBSTRATE SUPPORT DEVICE

A substrate support device includes a plate portion including a heater plate that includes a heating element provided in the heater plate, and also including a first cooling plate provided on a bottom surface of the heater plate and having a first flow path, and a second cooling plate provided on a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HANAMACHI TOSHIHIKO, ISHIOKA YASUAKI, HASHIMOTO DAISUKE
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A substrate support device includes a plate portion including a heater plate that includes a heating element provided in the heater plate, and also including a first cooling plate provided on a bottom surface of the heater plate and having a first flow path, and a second cooling plate provided on a top surface of the heater plate and having a second flow path; and a shaft portion supporting the plate portion and including a line connected to the heating element to supply an electric current to the heating element, and a tube supplying a coolant to the first cooling plate and the second cooling plate, the line and the tube being provided inside the shaft portion.