CURABLE RESIN COMPOSITION, RESIN MOLD FOR IMPRINTING, METHOD FOR PHOTO IMPRINTING, METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT, AND METHOD FOR MANUFACTURING FINE OPTICAL ELEMENT

A curable resin composition comprising: a fluorinated urethane(meth)acrylate represented by formula (1), wherein, R1, R2, R3 and R4 each independently represents a hydrogen atom or a methyl group, x and y each independently represents 1 or 2, and n represents an integer within the range of 1 to 10;...

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Hauptverfasser: OSAKI TAKESHI, WADA RISA
Format: Patent
Sprache:eng
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Zusammenfassung:A curable resin composition comprising: a fluorinated urethane(meth)acrylate represented by formula (1), wherein, R1, R2, R3 and R4 each independently represents a hydrogen atom or a methyl group, x and y each independently represents 1 or 2, and n represents an integer within the range of 1 to 10; R3 and R4 each independently represents the hydrogen atom when x and y are both 1; R3 represents the hydrogen atom and R4 represents the methyl group when x is 1 and y is 2; R3 represents the methyl group and R4 represents the hydrogen atom when x is 2 and y is 1; and R3 and R4 each independently represents the methyl group when x and y are both 2.