MECHANICAL DESIGN OF MULTIPLE ZONE PLATES PRECISION ALIGNMENT APPARATUS FOR HARD X-RAY FOCUSING IN TWENTY-NANOMETER SCALE

MECHANICAL DESIGN OF MULTIPLE ZONE PLATES PRECISION ALIGNMENT APPARATUS FOR HARD X-RAY FOCUSING IN TWENTY-NANOMETER SCALE

An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VILA-COMAMALA JOAN, GLEBER SOPHIE C, VOGT FRANZ STEFAN, ROEHRIG CHRISTIAN, LIU JIE, LAI BARRY, SHU DEMING, WOJCIK MICHAEL J, MASER JORG M
Format: Patent
Sprache:eng
Schlagworte:
GAMMA RAY OR X-RAY MICROSCOPES
IRRADIATION DEVICES
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.