INTEGRATED ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THEREOF

An embodiment of an integrated electronic device formed in a body of semiconductor material, which includes: a substrate of a first semiconductor material, the first semiconductor material having a first bandgap; a first epitaxial region of a second semiconductor material and having a first type of...

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Bibliographische Detailangaben
Hauptverfasser: IACONO CORRADO, MICCICHE' MONICA, CORONA DONATO, FRAZZETTO NICOLO, GRIMALDI ANTONIO GIUSEPPE
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An embodiment of an integrated electronic device formed in a body of semiconductor material, which includes: a substrate of a first semiconductor material, the first semiconductor material having a first bandgap; a first epitaxial region of a second semiconductor material and having a first type of conductivity, which overlies the substrate and defines a first surface, the second semiconductor material having a second bandgap wider than the first bandgap; and a second epitaxial region of the first semiconductor material, which overlies, and is in direct contact with, the first epitaxial region. The first epitaxial region includes a first buffer layer, which overlies the substrate, and a drift layer, which overlies the first buffer layer and defines the first surface, the first buffer layer and the drift layer having different doping levels.