METHOD AND SYSTEM FOR COMPENSATING SYSTEMATIC NON-LINEARITIES OF A SIGNAL PROVIDED BY A CAPACITIVE INERTIAL SENSOR

A method for compensating non-linearities of a read signal generated by a variable-capacitance inertial sensor including a first fixed electrode and a second fixed electrode and a mobile electrode, which is spatially arranged between the first and second fixed electrodes and is capacitively coupled...

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Hauptverfasser: MONTINARI PIERLUIGI, POLI SALVATORE, TOCCHIO ALESSANDRO, TRIPOLI GIOVANNI CARLO, CASTELLANO MARCO
Format: Patent
Sprache:eng
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Zusammenfassung:A method for compensating non-linearities of a read signal generated by a variable-capacitance inertial sensor including a first fixed electrode and a second fixed electrode and a mobile electrode, which is spatially arranged between the first and second fixed electrodes and is capacitively coupled to the first and second fixed electrodes, said method comprising the steps of: acquiring the read signal; identifying a first linear component and at least one first nonlinear component of the read signal; a generating a compensated output signal by subtracting the first nonlinear component from the read signal.