MICROMECHANICAL Z-AXIS GYROSCOPE

A micromechanical sensor device for measuring angular z-axis motion comprises two vibratory structures each having at least one proof mass. A suspension structure maintains the two vibratory structures in a mobile suspended position above the substrate for movement parallel to the substrate plane in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GIGAN OLIVIER, YANG YONGJUN, XU SHUJING, KERGUERIS CHRISTOPHE, PISELLA CHRISTIAN, LI BO
Format:	Patent
Sprache:	eng
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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