MICROMECHANICAL Z-AXIS GYROSCOPE

A micromechanical sensor device for measuring angular z-axis motion comprises two vibratory structures each having at least one proof mass. A suspension structure maintains the two vibratory structures in a mobile suspended position above the substrate for movement parallel to the substrate plane in drive-mode (x-axis) direction and in sense-mode direction (y-axis). A coupling support structure connects the coupling structure to an anchor structure and enables a rotational swinging movement of the coupling structure, the rotational swinging movement having an axis of rotation that is perpendicular to the substrate plane. Each of the vibratory structures comprises at least one shuttle mass coupled to the at least one proof mass by sense-mode springs, which are more flexible in sense-mode direction than in drive-mode direction (x), for activating a vibration movement of each vibratory structure. A sensing electrode structure for each proof mass is designed for detecting sense-mode movements that are parallel to the substrate plane, The coupling support structure is designed to also enable a translational movement of the coupling structure in drive-mode direction (x).