FLIP-CHIP BONDING METHOD AND SOLID-STATE IMAGE PICKUP DEVICE MANUFACTURING METHOD CHARACTERIZED IN INCLUDING FLIP-CHIP BONDING METHOD

FLIP-CHIP BONDING METHOD AND SOLID-STATE IMAGE PICKUP DEVICE MANUFACTURING METHOD CHARACTERIZED IN INCLUDING FLIP-CHIP BONDING METHOD

An electrode of an electronic component element (1) is bonded to an electrode (5) of a substrate (4) via a bump (2) by: after applying, to the bump (2), only a first pressure which is not less than a yield stress of a bulk material of which the bump (2) is made, reducing or stopping the application...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: SAKOTA NAOKI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An electrode of an electronic component element (1) is bonded to an electrode (5) of a substrate (4) via a bump (2) by: after applying, to the bump (2), only a first pressure which is not less than a yield stress of a bulk material of which the bump (2) is made, reducing or stopping the application of the first pressure; and while applying a given ultrasonic vibration to the bump (2), gradually applying a pressure to the bump (2) until the pressure reaches a second pressure which is not less than the yield stress of the bulk material of which the bump (2) is made.