SENSOR PROBE FOR BIO-SENSING AND CHEMICAL-SENSING APPLICATIONS

The basic structure and functionality of a probe as disclosed herein allows for flexibly incorporating into the probe, various sensing elements for various sensing applications. Two example applications among these various sensing applications include bio-sensing and chemical-sensing applications. F...

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Bibliographische Detailangaben
Hauptverfasser: RAJAGOPAL ADITYA, SCHERER AXEL, TOMBRELLO THOMAS A, HOMYK ANDREW P, HENRY MICHAEL D, WALAVALKAR SAMEER
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The basic structure and functionality of a probe as disclosed herein allows for flexibly incorporating into the probe, various sensing elements for various sensing applications. Two example applications among these various sensing applications include bio-sensing and chemical-sensing applications. For bio-sensing applications the probe, which is fabricated upon a silicon substrate, includes a bio-sensing element such as a nano-pillar transistor, and for chemical-sensing applications the probe includes a sensing element that has a functionalized contact area whereby the sensing element generates a voltage when exposed to one or more chemicals of interest.