CAPACITOR, RESISTOR AND RESISTOR-CAPACITOR COMPONENTS

Capacitor, resistor and resistor-capacitor components are described herein. In one embodiment, a die comprises first and second metal interconnect layers in a back end of line (BEOL) of the die, and an insulator between the first and second metal interconnect layers. The die also comprises a metal-insulator-metal (MIM) capacitor embedded in the insulator, the MIM capacitor comprising a first metal plate, a second metal plate, and a dielectric layer between the first and second metal plates. The die further comprises a metal resistor embedded in the insulator, wherein the metal resistor and the first metal plate of the MIM capacitor are formed from a same metal layer. In one example, the dielectric layer may have a higher dielectric constant than the insulator. In another example, the second metal plate of the MIM capacitor may overlap the metal resistor.