UV Light Source Having Combined Ionization and Formation of Excimers
The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber wherein the chamber has at least one area (37, 39) having several gas-filled plasma chambers (11 12),...
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Sprache: | eng |
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Zusammenfassung: | The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber wherein the chamber has at least one area (37, 39) having several gas-filled plasma chambers (11 12), transparent to UV light and/or VUV light. A first group (11) of plasma chambers is filled with an ionizable gas containing mercury and a second group (12) of plasma chambers is filled with a gas that forms excimers when suitably excited. |
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