UV Light Source Having Combined Ionization and Formation of Excimers

The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber wherein the chamber has at least one area (37, 39) having several gas-filled plasma chambers (11 12),...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ELKIN BENTSIAN, LOHNER ALEXANDER, EGNER SIEGFRIED
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber wherein the chamber has at least one area (37, 39) having several gas-filled plasma chambers (11 12), transparent to UV light and/or VUV light. A first group (11) of plasma chambers is filled with an ionizable gas containing mercury and a second group (12) of plasma chambers is filled with a gas that forms excimers when suitably excited.