PIXEL STRUCTURE

A fabrication method of a pixel structure includes the following steps. A first metal layer is patterned to form a source electrode and a drain electrode. A semiconductor material layer is patterned to form a channel layer and a pixel pattern. A first insulation layer is formed to cover the channel...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEE JEN-YU, SHIH TSUNG-HSIANG, TING HUNG, CHANG FAN-WEI, FANG SHOU-WEI, TSENG WEI-HAO, CHEN HONG-SYU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A fabrication method of a pixel structure includes the following steps. A first metal layer is patterned to form a source electrode and a drain electrode. A semiconductor material layer is patterned to form a channel layer and a pixel pattern. A first insulation layer is formed to cover the channel layer, the source electrode, the drain electrode and the pixel pattern. A gate electrode is formed on the first insulation layer located above the channel layer. A second insulation layer is formed to cover the gate electrode and the first insulation layer. A pixel opening is formed in the first insulation layer and the second insulation layer to expose a partial region of the pixel pattern. The partial region of the pixel pattern exposed by the pixel opening is modified so as to form a pixel electrode electrically connected to the drain electrode.