EVALUATION ELEMENT AND WAFER

An evaluation element includes a plurality of first wirings extending in a first direction, connection conductors, each connection conductor electrically contact a single one of the first wirings, and a plurality of second wirings extending in a second direction that crosses the first direction and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMANAKA TAKAYA, YOTSUMOTO AKIRA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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