EVALUATION ELEMENT AND WAFER
An evaluation element includes a plurality of first wirings extending in a first direction, connection conductors, each connection conductor electrically contact a single one of the first wirings, and a plurality of second wirings extending in a second direction that crosses the first direction and...
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Zusammenfassung: | An evaluation element includes a plurality of first wirings extending in a first direction, connection conductors, each connection conductor electrically contact a single one of the first wirings, and a plurality of second wirings extending in a second direction that crosses the first direction and electrically contacts the connection conductors contacting the first wirings. The connection conductors are provided in at least two separated positions on the same first wiring. The plurality of second wiring are positioned such that a series electrical connection is established, through the connection conductors and the first wirings, between one second wiring and another second wiring. |
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