ACCELERATION SENSOR

An acceleration sensor includes: an X detection portion that detects acceleration in an X direction by swinging a first movable electrode about a pair of beam portions; a Y detection portion that detects acceleration in a Y direction perpendicular to the X direction by swinging a second movable elec...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UEDA HIDEKI, YOSHIDA HITOSHI, TAURA TAKUMI, MORI TAKESHI, IBARA NOBUYUKI, GODA KAZUO, KISHIMOTO SHINICHI
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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