ACCELERATION SENSOR

An acceleration sensor includes: an X detection portion that detects acceleration in an X direction by swinging a first movable electrode about a pair of beam portions; a Y detection portion that detects acceleration in a Y direction perpendicular to the X direction by swinging a second movable elec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: UEDA HIDEKI, YOSHIDA HITOSHI, TAURA TAKUMI, MORI TAKESHI, IBARA NOBUYUKI, GODA KAZUO, KISHIMOTO SHINICHI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:An acceleration sensor includes: an X detection portion that detects acceleration in an X direction by swinging a first movable electrode about a pair of beam portions; a Y detection portion that detects acceleration in a Y direction perpendicular to the X direction by swinging a second movable electrode about a pair of beam portions; and a Z detection portion that detects acceleration in a Z direction by moving a third movable electrode, which is held by two pairs of beam portions in parallel in the vertical direction, characterized in that the X detection portion, the Y detection portion and the Z detection portion are arranged in one chip.