Method for Manufacturing Electron Source

A conventional method to process a tip fails to designate the dimension of the shape of the end of the tip, and so fails to obtain a tip having any desired diameter. Impurities may be attached to the tip. Based on a correlation between the voltage applied or the time during processing of the end of...

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Bibliographische Detailangaben
Hauptverfasser: SONOBE NOBUYUKI, NITTA HISAO, ICHIMURA TAKASHI, MURAKOSHI HISAYA, CHO BOKLAE
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A conventional method to process a tip fails to designate the dimension of the shape of the end of the tip, and so fails to obtain a tip having any desired diameter. Impurities may be attached to the tip. Based on a correlation between the voltage applied or the time during processing of the end of the tip and the diameter of the tip end, the applied voltage is controlled so as to obtain a desired diameter of the tip end for processing of the tip. This allows a sharpened tip made of a tungsten monocrystal thin wire to be manufactured to have any desired diameter in the range of 0.1 μm or more and 2.0 μm or less.