MICROVALVE DEVICE AND FLUID FLOW CONTROL METHOD

A microvalve device and fluid flow control method, the microvalve device comprising: a microvalve body, the microvalve body being composed of multiple layers and comprising a first layer (1) and a second layer (2) bonded with the first layer (1), the second layer (2) having a plurality of fluid port...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN PEIYI, ZHANG SHENGCHANG, WANG ZHEYAO, DENG NING, JIANG TINGHOU
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A microvalve device and fluid flow control method, the microvalve device comprising: a microvalve body, the microvalve body being composed of multiple layers and comprising a first layer (1) and a second layer (2) bonded with the first layer (1), the second layer (2) having a plurality of fluid ports (7, 8, 9); a cavity (6) disposed between the first layer and the second layer; a plurality of actuators (3, 4, 5) respectively disposed corresponding to each fluid port, the plurality of actuators (3, 4, 5) controlling the opening and closing of the plurality of fluid ports (7, 8, 9). The fluid flow control method comprising: respectively employing a plurality of actuators to independently control the opening and closing of a plurality of fluid ports.