ROBOT AND SUBSTRATE HANDLING APPARATUS INCLUDING THE SAME

The robot including a main body, an arm connected to the main body, a hand connected to the arm, the hand including a hand base and a finger, and a hand bracket unit between the hand base and the finger or between the hand base and the arm, may be provided. The hand bracket unit may include a vibrat...

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Hauptverfasser: PARK JUNGJUN, PARK KANG-MIN, KIM BYEONGSANG, HWANG JAECHUL
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creator PARK JUNGJUN
PARK KANG-MIN
KIM BYEONGSANG
HWANG JAECHUL
description The robot including a main body, an arm connected to the main body, a hand connected to the arm, the hand including a hand base and a finger, and a hand bracket unit between the hand base and the finger or between the hand base and the arm, may be provided. The hand bracket unit may include a vibration damping member provided between the hand base and the finger or between the hand base and the arm, thereby damping vibration of the hand base or the finger.
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subjects BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
title ROBOT AND SUBSTRATE HANDLING APPARATUS INCLUDING THE SAME
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