ROBOT AND SUBSTRATE HANDLING APPARATUS INCLUDING THE SAME

The robot including a main body, an arm connected to the main body, a hand connected to the arm, the hand including a hand base and a finger, and a hand bracket unit between the hand base and the finger or between the hand base and the arm, may be provided. The hand bracket unit may include a vibrat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK JUNGJUN, PARK KANG-MIN, KIM BYEONGSANG, HWANG JAECHUL
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The robot including a main body, an arm connected to the main body, a hand connected to the arm, the hand including a hand base and a finger, and a hand bracket unit between the hand base and the finger or between the hand base and the arm, may be provided. The hand bracket unit may include a vibration damping member provided between the hand base and the finger or between the hand base and the arm, thereby damping vibration of the hand base or the finger.