ANGULAR ACCELERATION SENSOR

An angular acceleration sensor includes a flat plate surface, a fixed portion, a weight portion, and a beam portion. The weight portion includes a recessed portion that is recessed in an X-axis negative direction in the flat plate surface. The fixed portion includes a projecting portion that project...

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1. Verfasser: ICHIMARU MASAYUKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An angular acceleration sensor includes a flat plate surface, a fixed portion, a weight portion, and a beam portion. The weight portion includes a recessed portion that is recessed in an X-axis negative direction in the flat plate surface. The fixed portion includes a projecting portion that projects in the X-axis negative direction in the flat plate surface to be opposed to the recessed portion. The beam portion extends from the projecting portion in a Y-axis positive direction in the flat plate surface, and is connected to the recessed portion at an end portion in the Y-axis positive direction. Beam-portion proximity regions of the fixed portion and the weight portion in proximity to connecting positions to the beam portion are plane-symmetrical with respect to a stress neutral plane in the flat plate surface.