CEILING STORAGE DEVICE CAPABLE OF WAFER PURGING

The invention provides an apparatus for stocking and purging a wafer at a ceiling. The apparatus includes: a rail that is formed so as to be installed on a ceiling to guide a vehicle; a stock system that is formed so as to be installed on the ceiling and is formed so as to receive a container, which...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	CHOI SUNG GOO, LEE HO GEUN, YUN JUN PIL, JANG JAE WON, LEE JUNG YOUNG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The invention provides an apparatus for stocking and purging a wafer at a ceiling. The apparatus includes: a rail that is formed so as to be installed on a ceiling to guide a vehicle; a stock system that is formed so as to be installed on the ceiling and is formed so as to receive a container, which contains wafers, from the vehicle and stock the container; and a purge assembly that is installed so as to communicate with the container through the stock system and is formed so as to purge the wafers, which are contained in the container, with gas.