ZERO-BIAS CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS AND FABRICATION METHOD THEREOF

The present invention provides a zero-bias capacitive micromachined ultrasonic transducer element, comprising: a substrate having a lower electrode formed therein; a membrane structure that structurally supports an upper electrode over the lower electrode, wherein the upper electrode has at least on...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TIEN YU-SHAN, LIN FANG-YU, TIAN WEING, LI PAII
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL GENERATION METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS TRANSPORTING
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