ZERO-BIAS CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS AND FABRICATION METHOD THEREOF

ZERO-BIAS CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS AND FABRICATION METHOD THEREOF

The present invention provides a zero-bias capacitive micromachined ultrasonic transducer element, comprising: a substrate having a lower electrode formed therein; a membrane structure that structurally supports an upper electrode over the lower electrode, wherein the upper electrode has at least on...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TIEN YU-SHAN, LIN FANG-YU, TIAN WEING, LI PAII
Format: Patent
Sprache:eng
Schlagworte:
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FOR PERFORMING MECHANICAL WORK IN GENERAL
GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
GENERATION
METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY
PERFORMING OPERATIONS
TRANSPORTING
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Beschreibung
Zusammenfassung:The present invention provides a zero-bias capacitive micromachined ultrasonic transducer element, comprising: a substrate having a lower electrode formed therein; a membrane structure that structurally supports an upper electrode over the lower electrode, wherein the upper electrode has at least one protruding part thereunder; a cavity between the substrate and the membrane structure; and a polymeric material coated on an inner surface of the cavity. The fabrication method of the zero-bias capacitive micromachined ultrasonic transducer element is also provided.