Capacitors and Methods of Forming Capacitors
A method of forming a capacitor includes forming an elevationally elongated and elevationally inner capacitor electrode that comprises different composition laterally-outermost and laterally-innermost conductive portions that have different respective intrinsic residual mechanical stress. The innerm...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method of forming a capacitor includes forming an elevationally elongated and elevationally inner capacitor electrode that comprises different composition laterally-outermost and laterally-innermost conductive portions that have different respective intrinsic residual mechanical stress. The innermost conductive portion is formed to have greater mechanical stress in the compressive direction than the outermost conductive portion. A capacitor dielectric is formed over the inner capacitor electrode and an elevationally outer capacitor electrode is formed over the capacitor dielectric. A capacitor construction independent of the method formed is disclosed. |
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