METHODS FOR FABRICATING INTEGRATED CIRCUITS USING CHEMICAL MECHANICAL POLISHING

Methods for fabricating integrated circuits are disclosed. In an exemplary embodiment, a method for fabricating an integrated circuit includes forming a silicon material layer over a semiconductor substrate. The semiconductor substrate includes a logic device region and a memory array region. The memory array region has a memory device formed on the semiconductor substrate. The method further includes forming a capping layer over the silicon material layer and over the memory device and removing the capping layer from over the memory device in the memory array region using a first chemical mechanical polishing process while leaving at least a first portion of the capping layer in place over the logic device region. Further, the method includes removing the first the silicon material layer from over the memory device in the memory array region using a second chemical mechanical polishing process.