ELECTRONIC DEVICE MANUFACTURE USING LOW-k DIELECTRIC MATERIALS

Materials and methods for manufacturing electronic devices and semiconductor components using low dielectric materials comprising polyimide based aerogels are described. Additional methods for manipulating the properties of the dielectric materials and affecting the overall dielectric property of th...

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Hauptverfasser:	RHINE WENDELL E, SINTA ROGER, GOULD GEORGE L, NAIMAN ALARIC, BEGAG REDOUANE, ZAFIROPOULOS NICHOLAS ANTHONY, TRIFU ROXANA, DONG WENTING, NAHASS PAUL, WHITE SHANNON OLGA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	Materials and methods for manufacturing electronic devices and semiconductor components using low dielectric materials comprising polyimide based aerogels are described. Additional methods for manipulating the properties of the dielectric materials and affecting the overall dielectric property of the system are also provided.