High Throughput Imprint Based on Contact Line Motion Tracking Control

Systems for controlling velocity of a contact line and height profile between a template and a substrate during imprinting of polymerizable material are described.

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Bibliographische Detailangaben
Hauptverfasser:	LU XIAOMING, SCHUMAKER PHILIP D
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	Systems for controlling velocity of a contact line and height profile between a template and a substrate during imprinting of polymerizable material are described.