MICROWAVE HEATING APPARATUS AND PROCESSING METHOD

MICROWAVE HEATING APPARATUS AND PROCESSING METHOD

A microwave heating apparatus includes a processing chamber for accommodating a target, a support device for supporting the target in the processing chamber and a microwave introducing device for generating microwaves to introduce them into the processing chamber. The processing chamber further incl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMASHITA JUN, MAENISHI MASAYOSHI, SHIMOMURA KOUJI, YAMAZAKI RYOJI, TANAKA SUMI, MONDEN TAICHI, KABE YOSHIRO, HONG SEOKHYOUNG, IKEDA TARO, BAN MASAKAZU
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A microwave heating apparatus includes a processing chamber for accommodating a target, a support device for supporting the target in the processing chamber and a microwave introducing device for generating microwaves to introduce them into the processing chamber. The processing chamber further includes a top wall having a plurality of microwave introduction ports to introduce the microwaves generated in the microwave introducing device into the processing chamber. Each of the microwave introduction ports has a rectangular shape having long sides and short sides parallel to inner wall surfaces of four sidewalls of the processing chamber, and the support device includes a support member to support the target and a rotating mechanism for rotating the supported target.