LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD

Metal is locally heated to a predetermined temperature within a predetermined time. A laser annealing apparatus forms a line beam at a focusing position in a heatable area on a workpiece by an optical system, which has a long and narrow shape having a width of 0.5 μm all to 20 μm in the short direct...

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Bibliographische Detailangaben
Hauptverfasser:	OGINO YOSHIAKI, TAMI YOSHIHARU, SOGA KAZUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	Metal is locally heated to a predetermined temperature within a predetermined time. A laser annealing apparatus forms a line beam at a focusing position in a heatable area on a workpiece by an optical system, which has a long and narrow shape having a width of 0.5 μm all to 20 μm in the short direction and a long width of 6 μm to 200 μm in the length direction and has a depth of focus in the range of 2 μm to 4 μm, by using a semiconductor laser element that generates laser light, while moving a movable stage on which the workpiece has been mounted in an X direction and a Y direction; and selectively performs a heating step of performing laser annealing while controlling focusing and second laser power that has an output lower than the output of first laser power in the unheatable area on the workpiece.