FIELD ASYMMETRIC ION MOBILITY SPECTROMETRY FILTER

Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.

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Hauptverfasser: ALLSWORTH MAX, HART MATTHEW, SOMERVILLE JOHN, ORRELL RICHARD, NEGRI ANTONI, PEARSON JON, SPINKS JEREMY, HOLDEN MARTIN, KOEHL ANDREW H, TAYLOR ALISTAIR, TOUTOUNGI DANIELLE
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creator ALLSWORTH MAX
HART MATTHEW
SOMERVILLE JOHN
ORRELL RICHARD
NEGRI ANTONI
PEARSON JON
SPINKS JEREMY
HOLDEN MARTIN
KOEHL ANDREW H
TAYLOR ALISTAIR
TOUTOUNGI DANIELLE
description Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.
format Patent
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recordid cdi_epo_espacenet_US2015028196A1
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title FIELD ASYMMETRIC ION MOBILITY SPECTROMETRY FILTER
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