FIELD ASYMMETRIC ION MOBILITY SPECTROMETRY FILTER

Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.

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Bibliographische Detailangaben
Hauptverfasser:	ALLSWORTH MAX, HART MATTHEW, SOMERVILLE JOHN, ORRELL RICHARD, NEGRI ANTONI, PEARSON JON, SPINKS JEREMY, HOLDEN MARTIN, KOEHL ANDREW H, TAYLOR ALISTAIR, TOUTOUNGI DANIELLE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.