SEMICONDUCTOR DEVICES INCLUDING DEVICE ISOLATION STRUCTURES AND METHOD OF FORMING THE SAME

SEMICONDUCTOR DEVICES INCLUDING DEVICE ISOLATION STRUCTURES AND METHOD OF FORMING THE SAME

Provided are semiconductor devices and methods of forming the same. A device isolation structure in the semiconductor device includes a gap region. A dielectric constant of a vacuum or an air in the gap region is smaller than a dielectric constant of an oxide layer and, as a result coupling and atte...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HAN TAE-JONG, KIM DAEWOONG, KIM HONGSUK, YANG JUNKYU
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Provided are semiconductor devices and methods of forming the same. A device isolation structure in the semiconductor device includes a gap region. A dielectric constant of a vacuum or an air in the gap region is smaller than a dielectric constant of an oxide layer and, as a result coupling and attendant interference between adjacent cells may be reduced.