METHOD AND APPARATUS FOR IC 3D LEAD INSPECTION HAVING COLOR SHADOWING

A system for three-dimensional inspection of leads mounted on an integrated circuit device includes an integrated circuit device, a first light source having a first color, a second light source having a second color different from the first color, a RGB color camera and a processor. The first light...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FRANDSEN, JR. WALTER JAMES, DING KEXIANG KEN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A system for three-dimensional inspection of leads mounted on an integrated circuit device includes an integrated circuit device, a first light source having a first color, a second light source having a second color different from the first color, a RGB color camera and a processor. The first light source is disposed at an acute angle to the integrated circuit device, and is configured to illuminate the leads such that lead shadows are created in a first color plane. The second light source is disposed in front of a surface of the integrated circuit device on which the leads are mounted, and is configured to illuminate the leads in a second color plane. The camera is configured to image the illuminated leads and lead shadows. The processor is configured to analyze the first and second color planes of a single image to detect three-dimensional bent leads.