SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME

According to one embodiment, a semiconductor memory device includes a lower gate layer, a stacked body including a plurality of electrode layers and a plurality of insulating layers, alternately stacked on the lower gate layer, a channel body extending within the stacked body from the topmost electr...

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Bibliographische Detailangaben
Hauptverfasser: NAKAI TSUKASA, KUGE NOBUHITO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:According to one embodiment, a semiconductor memory device includes a lower gate layer, a stacked body including a plurality of electrode layers and a plurality of insulating layers, alternately stacked on the lower gate layer, a channel body extending within the stacked body from the topmost electrode layer to the lower gate layer, and a memory film provided between the electrode layer and the channel body. The memory film includes a charge storage film. The electrode layer includes a step portion in which a step is formed in a stacking direction of the stacked body. The channel body and the memory film pass through the step portion.