DEVICE FOR FORMING AMORPHOUS FILM AND METHOD FOR FORMING SAME

PROBLEM: To provide a large device and a method which is advantageous for forming a large-area amorphous film. SOLUTION: A device of the invention sprays a flame including a particulate material with a spraying machine toward a substrate, melts the material with the flame, and cools the material and...

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Bibliographische Detailangaben
Hauptverfasser:	KURAHASHI RYUROU, TAKEHARA JUNJI, MATSUMOTO HIROSHI, FUKUTOME YOSHIHISA
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM: To provide a large device and a method which is advantageous for forming a large-area amorphous film. SOLUTION: A device of the invention sprays a flame including a particulate material with a spraying machine toward a substrate, melts the material with the flame, and cools the material and flame by cooling gas before they reach the substrate to form an amorphous film. The spraying machine has particulate material spraying ports and flame spraying ports such that the flame including the material has an oblong cross section. Inert gas spraying ports are successively placed on both sides across the ports of the material and flame. Mist spraying ports are successively placed on both sides across the ports for the material, flame and inert gas. A skirt is attached/detached depending on a combustion gas or a film width to restrain film width narrowing and increase of film thickness deviation.