MICROELECTROMECHANICAL AND/OR NANOELECTROMECHANICAL STRUCTURE WITH A VARIABLE QUALITY FACTOR

Inertial sensor comprising a fixed part and at least one mass suspended from the fixed part and means of damping the displacement of the part suspended from the fixed part, said damping means being electromechanical damping means comprising at least one DC power supply source, one electrical resisto...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DEIMERLY YANNICK, REY PATRICE, JOURDAN GUILLAUME
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Inertial sensor comprising a fixed part and at least one mass suspended from the fixed part and means of damping the displacement of the part suspended from the fixed part, said damping means being electromechanical damping means comprising at least one DC power supply source, one electrical resistor and one variable capacitor in series, said variable capacitor being formed partly by the suspended part and partly by the fixed part such that displacement of the suspended part causes a variation of the capacitance of the variable capacitor.