SCANNING LASER MICROSCOPE

Brightness information with a wide dynamic range is acquired and observed while preventing degradation of a detector. The invention provides a microscope system including a scanner that two-dimensionally scans laser light emitted from a light source unit on a specimen; a detector (41) that detects l...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUWABARA YOHEI, ARAYA AKINORI
Format: Patent
Sprache:eng
Schlagworte:
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