PERFORMING IMAGE CALCULATION BASED ON SPATIAL COHERENCE

PERFORMING IMAGE CALCULATION BASED ON SPATIAL COHERENCE

Computer-implemented techniques for pixel source optics calculations using spatial coherence are disclosed. Pixelated sources are used for source-mask co-optimization to enhance semiconductor lithography. Calculation of a partially coherent imaging system is used for optical-lithography simulation....

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SCHMOELLER THOMAS, FAN YONGFA
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Beschreibung
Zusammenfassung:Computer-implemented techniques for pixel source optics calculations using spatial coherence are disclosed. Pixelated sources are used for source-mask co-optimization to enhance semiconductor lithography. Calculation of a partially coherent imaging system is used for optical-lithography simulation. The spatial coherence property of neighboring source points is used to reduce imaging calculation complexity. Two or more neighboring points are treated as one pseudo-spatially coherent area element.