ANGULAR RATE SENSOR HAVING MULTIPLE AXIS SENSING CAPABILITY

An angular rate sensor (20) includes a single drive mass (24) and distributed sense masses (36, 38, 40, 42) located within a central opening (30) of the drive mass (24). The drive mass (24) is enabled to rotate around the Z-axis (64) under electrostatic stimulus. The sense masses (36, 38, 40, 42) ar...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	LIN YIZHEN, MIJUSKOVIC DEJAN
Format:	Patent
Sprache:	eng
Schlagworte:	GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	An angular rate sensor (20) includes a single drive mass (24) and distributed sense masses (36, 38, 40, 42) located within a central opening (30) of the drive mass (24). The drive mass (24) is enabled to rotate around the Z-axis (64) under electrostatic stimulus. The sense masses (36, 38, 40, 42) are coupled to the drive mass by spring elements (44, 46, 48, 50) such that oscillatory rotary motion (90) of the drive mass imparts a linear drive motion (92, 94) on the sense masses. The distributed sense masses form two pairs of sense masses, where one pair senses X- and Z-axis angular rate and the other pair senses Y- and Z-axis angular rate. The sense masses are coupled to one another via a centrally located coupler element (34) to ensure that the sense masses of each pair are moving in anti-phase.