MICRODIAPHRAGM PUMP

A microdiaphragm pump having a diaphragm chamber in contact with one side of an intake valve and one side of a discharge valve. The microdiaphragm includes two valve plate sheets 12, in each of which a valve plate 14 of one of an intake valve 26 and a discharge valve 28 and a flow path aperture 16 that provides a passage of the other valve are formed and which are laminated in directions that are opposite from each other; two valve seat sheets 18, which are laminated to the laminate and in which valve seats 20 and valve stoppers 22 are formed; a base plate 32; a frame 34; a diaphragm 36; and a drive element 42. The microdiaphragm pump has extremely small external dimensions and provides high productivity, high flow control accuracy, a smooth operation, large suction and discharge forces, and high reliability.